Quartz Parts for Diffusion Furnace: Tube, Boat, Paddle & the Complete System
Quick Answer A semiconductor diffusion furnace typically runs on four fused silica components: the process tube (sometimes with a nested liner), the boat that carries wafers, the paddle that pushes the boat in and out, and a set of supporting pieces — spacers, end caps, dummy wafers, gas distribution nozzles. All are high-purity fused silica, but they solve different problems. The tube owns the process envelope. [...]