Quartz Tanks & Process Baths for Wet Benches
Quick Answer: A quartz tank is a high-purity fused silica vessel used to hold aggressive chemicals or process baths in semiconductor, solar, and laboratory wet processing — chosen over plastic or metal tanks where chemical purity, high-temperature resistance, and visual process monitoring all matter. FGQuartz manufactures standard rectangular and cylindrical tanks as well as fully custom flanged, ported, megasonic-integrated, and multi-chamber quartz tank assemblies built to your drawings.
Key Takeaways
- Six Tank Architectures: Standard rectangular/cylindrical, flanged & overflow, ported/drained, megasonic/ultrasonic, multi-chamber, and fully integrated welded assemblies.
- Wide Dimensional Range: 50 mm to 1500 mm+ dimensions, wall thickness 3–15 mm, capacity from 1 liter to 200+ liters.
- High Chemical & Thermal Resistance: Continuous service to approximately 1200°C, outstanding chemical resistance except to hydrofluoric acid and hot concentrated phosphoric acid.
- Leak-Proof Construction: High-purity seam welding and flange welding for structurally sound, chemically stable joints.
- No Minimum Order Quantity: Single prototype tanks through OEM volume supply.
- Full In-House Fabrication: Cutting, drilling, grooving, threading, grinding/polishing, thermal forming, and welding under one ISO 9001 facility.
FGQuartz is a professional quartz tanks manufacturer specializing in high-purity fused quartz tanks, baths, and custom quartz tank fabrication, supplying customers in 40+ countries since 2005. With more than 20 years of experience in quartz glass manufacturing, we support semiconductor wet processing, solar photovoltaic cleaning lines, chemical laboratories, and high-temperature industrial applications. Browse our full product portfolio.
What Is a Quartz Tank?
A quartz tank is a vessel fabricated from flat fused silica plates, welded together to hold liquid chemicals or process baths without contaminating them or being attacked by them. In wet processing equipment — particularly semiconductor wafer cleaning and etching benches — the tank material choice matters as much as the process chemistry itself: it must survive aggressive acids and bases, tolerate elevated bath temperatures, and, critically, must not leach metallic ions into a bath that will later touch a silicon wafer.
Fused quartz meets all three requirements at once, which is why it remains the standard tank material for the most purity-sensitive wet processes, even though plastic tanks (PP, PVDF, PFA) and PTFE-lined metal tanks are more common for less demanding chemical processes. FGQuartz manufactures high-quality quartz tanks and baths in a wide range of sizes and configurations, from standard rectangular and cylindrical holding tanks to complex welded and machined process bath assemblies built to customer drawings.
Quartz Tank Types We Manufacture
Below are the main quartz tank structures FGQuartz regularly produces. This helps purchasing and engineering teams quickly confirm whether we can meet their requirements. The table below is a quick reference; full detail on each type follows.
| Tank Type | Best For | Key Feature |
|---|---|---|
| Standard Tanks | Chemical storage, general wet processing | Rectangular or cylindrical, controlled wall thickness |
| Flanged & Overflow Tanks | Semiconductor wet benches, circulation systems | Welded/formed flanges, overflow weir structures |
| Ports & Drains | Modular plumbing integration | Bottom drains, side fill ports, threaded fittings |
| Megasonic / Ultrasonic Tanks | Acoustic wafer cleaning | Transducer mounting plates/windows, cooling jackets |
| Multi-Chamber Tanks | Sequential rinsing, cascade processes | Dual-chamber, cascade overflow, compartmentalized designs |
| Integrated Tank Assemblies | Drop-in equipment replacement | Fully welded, internal baffles, circulation piping |
Standard Quartz Tanks
We manufacture a full range of standard rectangular and cylindrical quartz tanks with controlled wall thickness and precise dimensions.
Available options include:
• Rectangular quartz baths
• Cylindrical holding tanks
• Large volume quartz tanks
• Thick-wall quartz tanks
These tanks are widely used for chemical storage, general wet processing, and high-purity laboratory applications.
Flanged & Overflow Tanks
Quartz tanks with welded or formed flanges for equipment integration and overflow weir structures.
Typical uses:
• Semiconductor wet benches
• Overflow cleaning processes
• Chemical circulation systems
• Equipment mounting interfaces
Flanged and overflow designs ensure smooth fluid dynamics and reliable structural support within semiconductor process tools.
Tanks with Ports & Drains
Quartz tanks fabricated with customized ports, threaded connections, and drain valves.
We can integrate:
• Bottom drain ports
• Side fill and circulation ports
• Threaded quartz fittings for chemical lines
These structures are ideal for modular wet processing systems requiring secure plumbing interfaces in semiconductor and laboratory environments.
Megasonic / Ultrasonic Tanks
High-purity quartz tanks designed for advanced acoustic cleaning processes.
We manufacture:
• Bottom transducer mounting plates
• Side-mounted transducer windows
• Integrated cooling jackets
These tanks are precision-engineered to withstand continuous vibration while maximizing particle removal efficiency in semiconductor wet cleaning.
Multi-Chamber Tanks
Complex divided baths and multi-chamber structures manufactured to print.
Available forms:
• Dual-chamber inner/outer baths
• Cascade overflow tanks
• Custom compartmentalized designs
Multi-chamber quartz tanks are utilized when sequential rinsing, recirculation, or space constraints demand integrated bath zones in advanced wet processing lines.
Integrated Tank Assemblies
Complete quartz bath systems produced by precision quartz plate welding.
We provide:
• Leak-proof seam welding
• Integration of internal baffles & guides
• Welded circulation pipes and manifolds
• Fully integrated chemical process modules
These assemblies allow for drop-in replacement and modular equipment construction. See our full custom fabrication capabilities.
Typical Specifications of Quartz Tanks
The following tables show typical specifications for FGQuartz high-purity quartz tanks. Custom dimensions and structures are available according to customer drawings. For complete material data, refer to our Technical Specifications.
1. Dimensional Range
| Parameter | Typical Range | Notes |
|---|---|---|
| Dimensions (L x W x H or Dia.) | 50 mm – 1500 mm+ | Large-scale custom tanks available on request |
| Wall Thickness | 3 mm – 15 mm | Selected for structural integrity based on tank size and use |
| Capacity / Volume | 1 liter up to 200+ liters | Scalable for R&D and mass production lines |
| Dimensional Precision | High precision available | Controlled for uniform flow and equipment integration |
2. Material & Purity
| Property | Typical Value |
|---|---|
| SiO₂ Purity | ≥ 99.99% |
| Metallic Impurities | Very low (ideal for sensitive wet processes) |
| Material Type | High-purity fused silica / fused quartz |
| Available Grades | Standard, UV-grade, opaque quartz (for heat shielding) |
3. Thermal & Physical Properties
| Property | Typical Value |
|---|---|
| Continuous Operating Temperature | Up to approx. 1200°C |
| Chemical Resistance | Outstanding (except HF and hot concentrated phosphoric acid) |
| Coefficient of Thermal Expansion | Approx. 5.5 × 10⁻⁷ /°C |
| Thermal Shock Resistance | Excellent |
Note: All specifications above are typical values. Final dimensions and structures are confirmed according to customer drawings and process requirements.
Quartz Tank Fabrication Capabilities
FGQuartz provides complete quartz tank fabrication capabilities for both standard and highly customized requirements, from simple modifications to complex multi-chamber process baths, ready for direct use in semiconductor wet benches, solar wafer cleaning lines, chemical laboratory systems and high-purity wet processing equipment.
Cutting — Precision cutting of quartz plates and tubes to exact dimensions with clean, square edges, suitable for custom tank walls, bottoms, and internal baffles.
Drilling — Accurate drilling of holes in various diameters and positions for side ports, drain holes, liquid level sensor openings, and multi-connection designs, without the uncontrolled fracture risk that conventional drilling poses in brittle fused silica.
Grooving & Slotting — Precision grooving and slotting for locating features, internal wafer guides, cassette support structures, and specialized fluid dynamic requirements.
Thread Machining — Internal and external thread machining for custom threaded ports and fittings, enabling mechanical connection, chemical circulation lines, and drain valves without introducing metal fasteners into the process bath.
Grinding & Polishing — Dimensional grinding and surface polishing to achieve tight tolerances on tank flatness and surface finish, including optical-grade polishing for sensor windows and transducer mounting surfaces.
Plate Bending / Thermal Forming — Controlled thermal slumping and bending of quartz plates for curved tank bottoms or seamless rounded corners, which reduces the stress concentration points that sharp corners would otherwise create.
Quartz Welding — High-purity seam welding for quartz plates, creating robust, leak-free tank joints that maintain material integrity and outstanding chemical resistance.
Flange Welding — Integration of top lips and heavy-duty flanges onto quartz tanks for reliable equipment mounting and overflow structural support in wet benches.
Port & Pipe Welding — Welding of side fill ports, drain tubes, and circulation manifolds to create custom fluid handling tank assemblies.
Custom Assembly — Complete fabrication of multi-part quartz tank systems combining plate cutting, slotting, precision grinding, and seam welding into a single finished component.
We specialize in custom quartz tank fabrication according to customer drawings (DXF, STEP, PDF and other formats). Whether you require a simple rectangular bath or a fully engineered multi-chamber, flanged, threaded and megasonic-integrated quartz tank assembly, FGQuartz can manufacture it with consistent quality from prototype to volume production. Learn more about our complete Custom Quartz Glass Fabrication.
Quartz Tanks vs. Alternative Tank Materials
Quartz is the standard choice for the most purity-sensitive wet processes, but plastic and PTFE-lined tanks are commonly used for less demanding chemistries.
| Material | Max Temp | Contamination Risk | Typical Use |
|---|---|---|---|
| Fused Quartz | ~1200°C | Very low (chemically inert, transparent for monitoring) | Semiconductor wet benches, high-purity acid baths |
| PP / PVDF Plastic | ~80–150°C (resin-dependent) | Low, but can leach trace organics at high temp | General chemical tanks, lower-temperature processes |
| PTFE-Lined Steel | ~200°C+ (liner-dependent) | Low if liner intact; metallic risk if liner fails | Industrial chemical processing, non-purity-critical |
Fused quartz remains the standard for semiconductor and solar wet benches because it combines chemical purity, high-temperature tolerance, and full transparency — letting operators visually monitor bath level and wafer processing, something opaque plastic or metal tanks cannot offer. Plastic and PTFE-lined tanks are typically specified for lower-temperature, less purity-critical chemical processes where cost is the priority.
Applications of Quartz Tanks
Semiconductor
Products we supply:
• Quartz wet benches
• RCA cleaning baths
• Etching quartz tanks
• Photoresist stripping baths
• Overflow & megasonic quartz tanks
Typical process applications:
• SC-1 and SC-2 cleaning
• BOE / HF etching (requires specialized liners/care)
• Piranha etching
• General high-purity wafer cleaning and stripping
Discover more Semiconductor Quartz.
Solar PV
Products we supply:
• Large volume quartz cleaning tanks
• Texturing baths
• Custom quartz tanks for cell manufacturing lines
Typical process applications:
• Wafer texturing and wet chemical cleaning
• TOPCon, HJT, and BC solar cell preparation steps
• High-temperature chemical baths
Explore Solar PV Quartz.
Chemical & Laboratory
Products we supply:
• High-purity acid boiling tanks
• Chemical storage tanks
• Custom R&D quartz baths
Used in analytical equipment, pure chemical processing, and sensitive laboratory fluid handling. Discover Laboratory Quartz.
Industrial Processing
Products we supply:
• Thick-wall industrial quartz tanks
• Custom reaction baths
• High-temperature holding tanks
Suitable for continuous high-temperature environments where extreme chemical inertness is required. See also High-Temperature Quartz.
How to Choose the Right Quartz Tank for Your Process
Use this three-step framework to specify the right tank before requesting a quote:
- Identify your process chemistry and temperature. Confirm the chemicals involved (note: hydrofluoric acid and hot concentrated phosphoric acid attack quartz and require special handling or alternative materials) and the operating temperature range.
- Define the fluid handling requirements. Decide whether you need simple holding capacity, overflow/circulation, megasonic integration, or multi-chamber sequential processing, and identify any ports, drains, or sensor windows required.
- Confirm capacity and equipment interface. Specify volume, footprint, and how the tank must mount into existing equipment (flanges, brackets, piping connections) — FGQuartz accepts single-piece prototype orders with no MOQ.
Send your process requirements, dimensions, or drawings to our engineering team for a feasibility review.
Quartz Tank Pricing: What Drives the Cost?
Quartz tank pricing depends on four main factors:
- Size and capacity — larger tanks require more raw material, plate welding, and handling during fabrication.
- Construction complexity — a simple rectangular holding tank costs far less than a flanged, ported, multi-chamber, or megasonic-integrated assembly.
- Machined and welded features — drains, ports, threaded fittings, internal baffles, and transducer windows each add fabrication steps.
- Order volume — unit pricing improves at higher volumes, though FGQuartz accepts single-piece prototype orders with no MOQ.
For an accurate quote, send your dimensions, capacity, and any drawings to our engineering team — quotations are typically returned within 24 business hours.
Quality Assurance & Handling Guidance
Every FGQuartz tank is inspected for weld integrity, dimensional accuracy, and leak-tightness before shipment under our ISO 9001 quality system.
In-service handling tip: Support tanks fully across their base during installation — uneven or point support can stress weld seams over time. Avoid hydrofluoric acid and hot concentrated phosphoric acid, which attack the quartz surface; for processes that require these chemistries, discuss alternative materials or protective measures with our engineering team before finalizing your tank design.
Why Choose FGQuartz
• 20+ years of specialized quartz glass manufacturing experience
• Strong custom quartz tank fabrication capability
• Precision machining for ports, internal slots, drains, and sensor windows
• Professional high-purity seam welding and flange welding capability
• Full OEM / ODM support for equipment manufacturers
• Support for both small batch prototypes and volume production, no minimum order quantity
• Manufacturing strictly according to customer drawings
• Global reach: export experience to 40+ countries with stable quality and reliable supply
Our goal is simple: whatever quartz tank design your wet process requires, FGQuartz can manufacture it. More about the company: About FGQuartz.
Frequently Asked Questions
Yes. We manufacture to OEM prints or reverse-engineer from samples for drop-in replacements. Critical details are inner dimensions, overflow height, port locations, flange pattern and any cassette or guide features. One prototype is accepted.
Quartz suits higher temperature and many acid cleans with very low metallic contamination. PTFE is preferred for HF and some chemistries that attack silica, but has lower continuous temperature limits. Choose by chemistry, temperature and contamination budget.
Send overall dimensions or capacity, wall thickness if known, overflow/flange/port requirements, chemistry and temperature, quantity, and drawings (DXF, STEP, IGES or PDF). We typically reply within 24 business hours. Email: [email protected]
Tanks are built from high-purity fused silica plate by cutting, drilling, machining and high-purity quartz welding. Flanges, ports and internal features are added as required, then annealed when needed for stress relief and leak-tight service.
Yes. We fabricate overflow weir tanks, megasonic/ultrasonic mounting designs, cascade and multi-chamber baths, and integrated assemblies with baffles, drains and welded ports according to your CAD or sample.
Typical ranges are about 50–1500 mm+ in major dimensions, wall thickness about 3–30 mm+, and volumes from about 1 liter to 200+ liters. Rectangular, cylindrical, overflow, flanged, multi-chamber and ported designs are made to drawing.
No. Hydrofluoric acid and fluoride-based etchants attack fused silica and will damage the tank. For HF/BOE service use PTFE or other HF-compatible materials. Confirm the full chemistry list on the RFQ for other acids.
Quartz tanks (quartz baths) hold high-purity process chemicals for wafer cleaning, etching and stripping on wet benches. Typical uses include SC-1/SC-2 (RCA) cleaning, photoresist strip and overflow rinse, where metallic contamination must stay very low.
Ready to Source Custom Quartz Tanks?
Whether you need standard quartz holding tanks, flanged baths, threaded drain tanks, multi-chamber designs, or fully integrated megasonic quartz tank assemblies, FGQuartz can manufacture according to your drawings and process requirements.
Send us your specifications or drawings. We will confirm feasibility and provide a clear quotation, normally within 24 business hours.