Quartz Tanks
Quartz tanks — also called quartz glass tanks, fused silica tanks, quartz baths, quartz cleaning tanks, or quartz wet-bench tanks — are welded fused silica vessels used for wet cleaning, acid etching, rinsing, and high-purity chemical holding. They stay inert to mineral acids, add no metal ions to the bath, and tolerate far higher temperatures than plastic tanks.
FGQuartz is a manufacturer and supplier of custom quartz tanks: rectangular process tanks, overflow tanks, double-wall (inner and outer) tanks, rinse tanks, and megasonic or ultrasonic cleaning tanks made from clear fused quartz with SiO₂ ≥ 99.99% and wall thickness of 3–15 mm, from small laboratory baths of about 1 L to industrial tanks over 200 L. Plates are diamond-cut, flame-welded, and annealed into leak-tight tanks with custom drain, inlet, overflow, and weir features. Custom manufacturing is available from a single prototype, with no minimum order quantity. We export to the USA, Europe, and worldwide.
Quick answer
What is a quartz tank used for? Quartz tanks hold aggressive chemicals and process baths in semiconductor wet benches, solar wafer cleaning lines, and laboratory chemical processing, where chemical purity and high-temperature resistance matter and HF is not in the bath.
Key takeaways
- Tanks are made to your drawing, so there is no fixed size list; send the chemistry, bath temperature, and liquid volume to size the wall and supports.
- Drains, inlets, overflow weirs, sensor ports, flanges, threaded fittings, heater or sparger interfaces, and megasonic transducer mounting plates, side windows, and cooling jackets are built in.
- Quartz is not suitable for HF, hot concentrated phosphoric acid, or hot strong alkalis.
Written by the FGQuartz Engineering Team · Updated October 2026
On this page: Specifications · Tank design · Quartz vs plastic · Tank types · Project examples · Applications · FAQ and quote
Lead time depends on size and drawing complexity; the quote confirms the schedule.
Features of high-purity quartz cleaning and process tanks
Product features
Quartz tank specifications
Technical specifications
Values below are FGQuartz published ranges for fused silica tanks. Dimensions, ports, and tolerances are set from the drawing and confirmed in design-for-manufacture (DFM) review.
| Parameter | Specification |
|---|---|
| Material | High-purity clear fused quartz / fused silica (SiO₂ ≥ 99.99%). |
| Wall thickness | 3 mm – 15 mm, selected by tank size, liquid depth, and temperature. |
| Tank size | From small laboratory baths (about 1 L) to industrial tanks over 200 L; dimensions from 50 mm to 1500 mm+, made to drawing. |
| Ports and features | Drain, inlet, outlet, overflow weirs, sensor ports, flanges, threaded fittings, and heater or sparger interfaces, fused or core-drilled. Megasonic and ultrasonic tanks add transducer mounting plates, side windows, and cooling jackets. |
| Internal supports | Cassette rails, boat supports, and false bottoms to drawing. |
| Surface finish | Fire-polished edges and weld seams, annealed after welding. |
| Chemical compatibility | DI water, HCl, HNO₃, H₂SO₄, aqua regia, organic solvents. Not for HF, hot concentrated phosphoric acid, or hot strong alkalis. |
| Processing | Diamond cutting, core drilling, CNC machining, oxy-hydrogen flame welding, fire polishing, annealing. |
| Customization | Build-to-print from DXF, STEP, IGES, or PDF, or from a process description (chemistry, bath temperature, liquid volume). Single prototypes through production. No MOQ. |
Full thermal, mechanical, optical, and chemical tables: Technical Specifications. Wall thickness and support layout are confirmed per drawing for the liquid depth and temperature.
Choosing the tank design
Tank selection
The process decides the design. A static soak tank is a simple welded box. A recirculating or overflow tank adds inlet ports and a weir so the bath stays filtered and level. A double-wall tank puts a process tank inside a catch tank to contain spills or carry a heating or cooling medium. A megasonic or ultrasonic tank adds a transducer mounting plate, side window, and cooling jacket.
Wall thickness rises with tank size and liquid depth, because a full quartz tank carries hydrostatic load on flat plates. Send the chemistry, bath temperature, and liquid volume so wall, corner radius, and support layout can be sized together. For heated baths, see quartz inline heaters; for background on the material, What is quartz glass?
Typical properties of fused silica
Typical values for high-purity fused silica. Optical transmission and OH content vary by grade.
| Continuous service | 1200°C |
| Short-term maximum | 1300°C |
| Softening point | ≈ 1680°C |
| Annealing point | ≈ 1215°C |
| Strain point | ≈ 1120°C |
| Thermal expansion (20–300°C) | 5.5 × 10⁻⁷ /°C |
| Thermal conductivity (20°C) | ≈ 1.4 W/(m·K) |
| Density | ≈ 2.2 g/cm³ |
Quartz tank vs plastic (PP / PVDF) tank
Comparison
Both are used for chemical baths. The choice turns on temperature, purity, and whether HF is present.
| Point | Quartz tank | Plastic tank (PP / PVDF) |
|---|---|---|
| Bath temperature | Much higher; set by the chemistry and heater design. | Lower; limited by the polymer. |
| Purity | Chemically inert, with no risk of leaching organics. | Polymer additives and organics can be a concern in ultra-pure baths. |
| Hydrofluoric acid | Not suitable. HF attacks fused silica. | Some plastics can hold HF. |
| Transparency | Clear; liquid level and flow are visible. | Usually translucent or opaque. |
| Cost | Higher. | Lower. |
| Handling | Rigid and brittle; needs full-face support and care at edges. | Tougher and more impact tolerant. |
General comparison for orientation; check the exact chemistry, concentration, and temperature for any real design. Quartz is the right choice when purity and temperature matter and HF is not in the bath.
Quartz tank types we fabricate: designs, ports, and features
Customization
FGQuartz does not publish a fixed tank size list. Each tank is made to your chemistry, wafer or part size, and equipment layout, from a single prototype to production, with no minimum order quantity. Non-tank custom parts are on the custom quartz glass page.
| Tank type | Typical use | What is fabricated |
|---|---|---|
| Process tanks | Wet cleaning and acid soak baths | Welded rectangular quartz tanks with drain and inlet ports. Specify: internal dimensions or liquid volume, wall thickness (or let us size it from the chemistry and temperature), and the position and size of each drain and inlet port. |
| Overflow tanks | Recirculating and filtered baths | Weir or cascade overflow edges, return ports, and bottom inlets. Specify: weir type (weir or cascade), weir height, and the positions and sizes of the return ports and bottom inlets. |
| Double-wall tanks | Spill containment and jacketed baths | Inner process tank inside an outer catch tank, welded as one assembly. Specify: inner and outer dimensions, the gap between them, whether the outer tank is for spill containment or for a heating or cooling medium, and the ports on each tank. |
| Rinse tanks | DI water rinse and quick-dump stations | Tanks with bottom drains, spray or inlet ports, and cassette supports. Specify: drain location, inlet or spray ports, and the cassette or boat size with its support positions. |
| Megasonic and ultrasonic tanks | Transducer-driven cleaning systems | Tanks with integrated transducer mounting plates, side windows, and cooling jackets. Specify: transducer size and mounting position, window locations, and the cooling-jacket requirement. |
| Heater-ready tanks | Heated chemical baths | Ports and flanges sized for quartz inline heaters, immersion heaters, or circulation loops. Specify: heater type (inline, immersion, or circulation loop) and the port or flange size and position. |
| Custom assemblies | OEM and non-standard bath designs | Build-to-print tanks with custom baffles, supports, and multi-chamber layouts. Specify: your drawing, or the chemistry, bath temperature, liquid volume, and equipment layout. |
Oxy-hydrogen fire polishing of a fused silica tank. Tank plates are cut, welded, and annealed in the same FGQuartz facility.
Representative tank builds
Project examples
Three typical custom tank projects, described by the requirement, the build route, and what is checked against the drawing. Customer names and confidential drawing data are withheld.
01 · Semiconductor wet cleaning
Overflow chemical tank
Requirement. A recirculating bath that stays level and filtered, with a weir and ports for the circulation loop.
How it is built. Quartz plates diamond-cut, core-drilled for ports, flame-welded with a weir edge, fire-polished and stress-relief annealed.
Checked against the drawing. Overall dimensions, weir height, port positions and sizes.
02 · Wet bench
Square process tank
Requirement. A clear, inert vessel for a chemical cleaning step with drain and inlet ports.
How it is built. Welded rectangular tank with fused or core-drilled ports and fire-polished edges, annealed after welding.
Checked against the drawing. Length, width, depth, wall thickness, and port layout.
03 · Cleaning line
Rinse tank with cassette supports
Requirement. A DI water rinse station that holds cassettes or boats clear of the base.
How it is built. Tank with bottom drain, inlet ports, and internal cassette rails or false bottom welded in, then annealed.
Checked against the drawing. Support positions, drain location, and overall dimensions.
Cut, welded, and annealed under one ISO 9001 system
Manufacturing and quality
FGQuartz operates a 15,000 m² facility in Lianyungang covering CNC diamond machining, oxy-hydrogen flame welding, fire polishing, and annealing, so cutting, welding, and stress relief of the tank happen in one plant. Learn more about FGQuartz.
Handling: support the full flat base of the tank and avoid point loads or impact on edges. Fill and drain gradually with baths at similar temperature to limit thermal shock. Clean with acid or alcohol before service; alkali salts and fingerprints promote devitrification at high temperature.
Quartz tank applications
Applications
Why specify FGQuartz
Manufacturer
Procurement questions
FAQ
Yes. FGQuartz manufactures quartz tanks with integrated transducer mounting plates, side windows, and cooling jackets.
Pricing depends on size, capacity, construction complexity, and order volume.
Yes. FGQuartz fabricates custom ports, threaded fittings, drains, flanges, and transducer windows to your drawings.
FGQuartz manufactures quartz tanks from small laboratory scale (around 1 liter) up to large industrial tanks over 200 liters, with dimensions from 50 mm to 1500 mm+ and wall thickness from 3–15 mm.
Standard fused quartz is attacked by hydrofluoric acid and should not be used to hold it directly.
Quartz tanks tolerate much higher temperatures and are chemically inert with no risk of leaching organics, but cost more and, unlike some plastics, are attacked by hydrofluoric acid.
Quartz tanks hold aggressive chemicals or process baths in semiconductor wet benches, solar wafer cleaning lines, and laboratory chemical processing, where chemical purity and high-temperature resistance matter.