Quartz Boat | Precision Semiconductor Quartz Wafer Boat Manufacturer in China
FGQuartz designs and manufactures high-purity semiconductor wafer boats (quartz wafer boats) for diffusion, oxidation, LPCVD, annealing, and solar cell thermal processes. Our boats utilize high-purity fused quartz and CNC-machined flame-polished grooves, resulting in precise groove geometry, low particle formation, and reliable thermal stability. Since 2005, we have served wafer fabs, solar cell manufacturers, and equipment OEMs in numerous countries worldwide.
What Is a Semiconductor Quartz Boat?
A semiconductor quartz boat (also called quartz wafer boat, diffusion furnace quartz boat or wafer carrier) is a precision-machined fused silica fixture that holds silicon wafers in accurately spaced slots during high-temperature thermal processing.
Inside diffusion, oxidation, LPCVD and annealing tube furnaces, the boat positions each wafer at a controlled pitch so process gases and heat reach both surfaces uniformly. Fused quartz is preferred because it combines ultra-high purity (SiO₂ ≥ 99.99 %), excellent thermal shock resistance, low thermal expansion and chemical inertness — properties essential for protecting wafer quality and process yield at high temperatures.
Key Advantages of FGQuartz Semiconductor Quartz Boats
Ultra-High Purity
SiO₂ ≥ 99.99 % with tightly controlled metallic impurities. Minimizes contamination risk to silicon wafers during high-temperature processing.
Precision Slot Geometry
CNC-machined slots with controlled pitch accuracy. Ensures uniform gas flow, consistent doping and oxide thickness across the wafer batch. Slot dimensions can be customized according to customer requirements.
Fire-Polished Low-Particle Surfaces
Slot contact surfaces are fire-polished to minimize particle generation and protect wafer edges during loading and unloading cycles.
High Temperature Stability
Suitable for continuous operation up to 1100 °C and short-term use up to 1200 °C, with good resistance to thermal shock and deformation.
Dimensional Stability
Low thermal expansion helps maintain slot geometry through repeated thermal cycles, supporting consistent process results.
Full Custom Capability
From 2″ legacy to 12″ (300 mm) production, horizontal or vertical configurations. Slot count, pitch and overall dimensions can be customized to match your furnace and process requirements.
Types of Quartz Boats & Wafer Carriers We Supply
Click any type to view detailed product page
Horizontal Furnace Quartz Boat
Standard diffusion & oxidation boats for horizontal tube furnaces, suitable for various wafer sizes.
Vertical Furnace Quartz Boat
Upright carriers for vertical thermal systems and high-throughput production lines.
150 / 200 / 300 mm Quartz Boat
Standard semiconductor sizes with common slot configurations for production fabs.
Custom Slot-Pitch Quartz Boat
Slot pitch and geometry engineered according to your furnace and process requirements.
LPCVD / CVD Quartz Boat
Optimized geometry and surface finish for low-pressure chemical vapor deposition processes.
Solar / PV Quartz Boat
High-capacity designs for solar cell diffusion and PECVD lines, including larger wafer formats.
Cantilever Paddle / Support
Complementary quartz components for vertical furnace loading systems.
Legacy 2″–6″ Quartz Boat
Compatible with older diffusion furnaces still in use in many fabs and R&D lines.
Fully Bespoke Quartz Boat
Made to your exact drawing, furnace model and process requirements.
Key Specifications
| Parameter | Value / Range |
|---|---|
| Material | High-purity fused quartz |
| SiO₂ Purity | ≥ 99.99 % |
| Wafer Size | 2″, 3″, 4″, 6″, 8″, 12″ (50–300 mm) and custom |
| Slot Count | Custom according to customer requirements |
| Slot Pitch | Custom according to customer requirements |
| Working Temperature | Up to 1100 °C continuous / 1200 °C short-term |
| Surface Treatment | Fire-polished slot surfaces for low particle generation |
| Available Forms | Horizontal, vertical, custom geometry |
For complete material properties (mechanical, optical, electrical, chemical purity), see our Technical Specifications page.
Core Applications of Our Semiconductor Quartz Boats
Diffusion Processes
Phosphorus and boron doping in horizontal or vertical diffusion furnaces. Suitable for both semiconductor and solar applications.
Thermal Oxidation
Dry or wet oxide growth for gate and field oxides with good thickness uniformity.
LPCVD & CVD
Low-pressure chemical vapor deposition of polysilicon, nitride and oxide films.
Annealing & Drive-In
Post-implant annealing and dopant drive-in processes requiring good temperature uniformity and low contamination.
Solar Cell Manufacturing
High-volume diffusion and related thermal processes for PERC, TOPCon and other solar cell technologies.
R&D and Pilot Lines
Custom boats for research furnaces, new process development and low-volume specialty production.
Custom Quartz Boat Fabrication Service
As an experienced semiconductor quartz boat manufacturer in China, FGQuartz provides complete custom solutions matched to your furnace model, wafer size and process requirements. CNC machining from high-purity fused silica, combined with fire polishing and careful process control, ensures good dimensional accuracy, low particle generation and reliable performance.
CNC Slot Machining
Fire Polishing of Slot Surfaces
Dimensional Inspection
Custom Pitch & Tooth Design
Compatibility with Major Furnace Brands
Prototype to Volume Production
Quality Control & Why Choose FGQuartz
Full Inspection Process
- Raw material purity verification (SiO₂ ≥ 99.99 %)
- Dimensional and slot geometry inspection
- Surface quality check after fire polishing
- Final visual and cleanliness inspection
Why FGQuartz
- 20+ years experience as a professional quartz boat manufacturer in China
- ISO 9001 certified production facility
- Stable high-purity fused silica supply chain
- CNC machining capability for custom wafer boat orders
Delivery & Service
- Strict quality control for semiconductor and solar customers
- Standard items: 7–14 days
- Custom orders: typically 3–6 weeks
- Professional export service to over 40 countries worldwide
Frequently Asked Questions
Our semiconductor quartz boats are used in diffusion, oxidation, thermal annealing, and LPCVD/CVD tube-furnace processes, as well as ultra-clean wafer handling between wet-process and inspection stations. They are equally suited to semiconductor wafer fabs and solar cell production lines.
Yes. Send a drawing (DXF, STEP or IGES), a furnace model reference, or even a photo and dimensions of a worn boat. Our engineering team reverse-engineers the geometry and produces a drop-in replacement quartz boat for your tool.
Yes. We produce vertical quartz wafer boats and horizontal diffusion-furnace quartz boats. Tell us your tube-furnace platform and we will match the base rail, handle geometry and slot profile to your loadport and process tube.
Boats are made from high-purity fused silica and inspected and packed clean to avoid particle and metallic contamination.
Yes. Slot count, spacing and orientation (horizontal or vertical) are customizable, with no minimum order quantity.
Diffusion, oxidation and LPCVD/CVD furnace processes in semiconductor and solar wafer manufacturing.
A range of wafer sizes including up to 300 mm, with custom slot count and spacing to match your process.
Ready to Source Semiconductor Quartz Boats?
Whether you need standard quartz wafer boats for diffusion and oxidation furnaces, custom slot-pitch carriers, solar high-capacity designs, or fully engineered semiconductor quartz boats for your specific process, FGQuartz is your trusted high-purity quartz boat manufacturer in China. We support wafer fabs, solar cell manufacturers and equipment OEMs worldwide.
Email: [email protected]
Business Hours: Mon – Sat 9am to 6pm