Quartz Wafer Boats for Semiconductor & Solar
FGQuartz is a specialized manufacturer of high-purity quartz wafer boats and custom wafer carriers. We produce standard and fully customized quartz boats for diffusion, oxidation, LPCVD, annealing and high-capacity solar processes.
With over 20 years of fused silica expertise, we deliver micro-precision slot geometries, low particle generation and excellent high-temperature sag resistance. Explore our full quartz product range or our custom fabrication capabilities.
Quartz Wafer Boats Overview
FGQuartz manufactures high-performance quartz boats designed to securely hold silicon wafers during extreme thermal cycling. From standard horizontal boats to precision vertical configurations, we tailor solutions to your furnace and process requirements.
We supply:
• Standard semiconductor and solar quartz boats
• Fully custom quartz wafer boats to CAD drawings
• Horizontal, vertical and half-shell designs
• Custom slot pitches, profiles and capacities
• Integrated boat sleds and push paddles
For matching components, see our quartz process tubes, support rods and crucibles.
Typical Specifications of Quartz Boats
The following tables show baseline specifications of FGQuartz high-purity quartz boats. All dimensions and slot profiles are fully customizable. Complete material data is available on our Technical Specifications page.
1. Dimensional & Design Range
| Parameter | Typical Range | Notes |
|---|---|---|
| Wafer Size Compatibility | 2″ – 12″ (50–300 mm) | Supports M10 / G12 solar formats |
| Slot Pitch & Width | Custom (Typical 2.0 – 6.0 mm) | High precision |
| Payload Capacity | 25 / 50 / 100 / 150+ slots | High-density and back-to-back designs |
| Surface Finish | Flame-polished / Fine CNC milled | Optimized for low particle generation |
2. Material Purity
| Property | Typical Value |
|---|---|
| SiO₂ Purity | ≥ 99.99% |
| Trace Metallic Impurities | Ultra-low |
| Material Type | High-purity fused silica |
3. Thermal & Physical Performance
| Property | Typical Value |
|---|---|
| Continuous Operating Temp. | Up to 1200 °C |
| High-Temperature Sag Resistance | Excellent |
| Coefficient of Thermal Expansion | ≈ 5.5 × 10⁻⁷ /°C |
| Thermal Shock Resistance | Outstanding |
Quartz Boat Types We Engineer
Primary quartz boat architectures manufactured by FGQuartz.
Diffusion Quartz Boats
Engineered for uniform gas flow during atmospheric diffusion.
• Precise wafer pitch for optimal doping
• Fire-polished slots to prevent scratching
• Horizontal and vertical configurations
Used extensively in semiconductor front-end processes.
Oxidation Quartz Boats
Thermally robust carriers for wet and dry oxide growth.
• Superior sag resistance at 1000°C+
• Open design for uniform oxide thickness
• Compatible with opaque heat baffles
LPCVD Quartz Boats
Specialized carriers for Low Pressure CVD environments.
• Optimized to reduce film flaking
• Tight-tolerance slots for vacuum stability
• Caged and sled assemblies available
Annealing Quartz Boats
Durable structures for rapid thermal shock resistance.
• Excellent resistance to thermal stress
• Maintains strict wafer spacing
• Heavy-duty rod construction
Solar High-Capacity Boats
High-throughput carriers for modern PV lines.
• Optimized for M10 / G12 formats
• High-density and back-to-back loading
• Reinforced for robotic handling
See our Solar Photovoltaic Quartz page.
Custom Quartz Carriers
Fully custom wafer holders machined to your drawings.
• Custom pitch, angle and groove profiles
• Half-shell and integrated end-plate designs
• Reverse engineering of legacy parts
Explore custom fabrication.
Advanced Fabrication & Slotting Capabilities
Manufacturing semiconductor-grade quartz boats requires precise combination of CNC cold machining and stress-free thermal processing.
Core capabilities:
• Multi-Axis CNC Slotting — Diamond milling of V-grooves and U-grooves with ±0.05 mm pitch accuracy
• Thermal Welding & Assembly — High-strength oxy-hydrogen flame joints
• Fire Polishing — Eliminates micro-cracks and reduces particle shedding
• Stress-Relief Annealing — Prevents warping under high temperature
• Dimensional Metrology — CMM verification of slot pitch, parallelism and bow
Learn more about our cold processing and thermal processing capabilities.
Applications of Quartz Boats
Semiconductor Fabs
• Diffusion and oxidation processes
• LPCVD (Poly-Si, SiN, LTO)
• RTP and annealing
• Wet cleaning cassettes
Full solutions on our Semiconductor Quartz page.
Solar PV Manufacturing
• High-density boats for POCl₃ diffusion
• ALD / PECVD protective carriers
• Robotic loading for M10 / G12 wafers
Why Choose FGQuartz for Wafer Boats
• 20+ years of fused silica expertise
• Precision CNC slotting with low particle generation
• Integrated machining, welding and annealing under one roof
• No MOQ — from single prototype to volume production
• Full matching product range: process tubes, rods and crucibles
• Learn more about FGQuartz
Frequently Asked Questions
Our semiconductor quartz boats are used in diffusion, oxidation, thermal annealing, and LPCVD/CVD tube-furnace processes, as well as ultra-clean wafer handling between wet-process and inspection stations. They are equally suited to semiconductor wafer fabs and solar cell production lines.
Yes. Send a drawing (DXF, STEP or IGES), a furnace model reference, or even a photo and dimensions of a worn boat. Our engineering team reverse-engineers the geometry and produces a drop-in replacement quartz boat for your tool.
Yes. We produce vertical quartz wafer boats and horizontal diffusion-furnace quartz boats. Tell us your tube-furnace platform and we will match the base rail, handle geometry and slot profile to your loadport and process tube.
Boats are made from high-purity fused silica and inspected and packed clean to avoid particle and metallic contamination.
Yes. Slot count, spacing and orientation (horizontal or vertical) are customizable, with no minimum order quantity.
Diffusion, oxidation and LPCVD/CVD furnace processes in semiconductor and solar wafer manufacturing.
A range of wafer sizes including up to 300 mm, with custom slot count and spacing to match your process.
Ready to Source Quartz Wafer Boats?
Submit your CAD drawings or dimensional requirements. Our engineering team will review and provide a quotation within 24 business hours.
Browse our complete quartz product portfolio or explore industry applications.