Semiconductor Quartz Glass | High-Purity Fused Silica for Wafer Processing
FGQuartz manufactures high-purity semiconductor quartz glass components for front-end wafer processing. Our product range includes process tubes, wafer boats, gas injectors, furnace liners, wet-bench vessels and fully custom quartzware engineered for diffusion, oxidation, LPCVD, annealing and cleaning processes in modern semiconductor fabs.
Why Quartz Glass Is Essential in Semiconductor Manufacturing
In semiconductor fabrication, every wafer passes through multiple high-temperature and chemical processes. High-purity fused silica (semiconductor quartz glass) is the material of choice because it combines:
– Extreme thermal stability and resistance to thermal shock
– Very low metallic impurity levels to prevent contamination
– Excellent chemical resistance to process gases and wet chemicals
– Dimensional stability under repeated thermal cycling
– Optical transparency for pyrometry and process monitoring
FGQuartz has supplied semiconductor-grade quartz components since 2005, supporting both standard geometries and fully custom designs for horizontal and vertical furnace platforms worldwide.
Complete Semiconductor Quartz Product Range
Process & Diffusion Tubes
The core component of thermal furnace systems. Available in clear and opaque grades for horizontal and vertical configurations. Used in oxidation, diffusion, annealing and LPCVD processes. Custom flanges, end treatments and sizes available to match specific furnace platforms.
Semiconductor Wafer Boats
Precision quartz wafer carriers for 2-inch to 12-inch wafers. Designed for low particle generation, uniform heating and long service life in diffusion, oxidation and annealing furnaces. Slot geometry and pitch customized according to customer requirements.
Gas Injectors & Nozzles
High-purity quartz injectors that deliver process gases uniformly into the furnace tube. Critical for film uniformity in CVD and diffusion processes. Available in standard and custom multi-port designs.
Furnace Liners & Pedestals
Protective liners and support components that extend the life of process tubes and improve thermal uniformity. Opaque and clear grades available depending on process requirements.
Wet Bench & Cleaning Components
Quartz tanks, boats, carriers and vessels used in wet cleaning, etching and stripping processes. High chemical resistance to acids and cleaning solutions with minimal metallic contamination.
Custom Semiconductor Quartzware
Fully custom components manufactured to customer drawings or reverse-engineered from samples. Includes push paddles, end caps, baffles, thermocouple sheaths and specialized process fixtures.
Quartz Glass Across Key Semiconductor Process Modules
Diffusion & Oxidation Furnaces
High-temperature processes that introduce dopants or grow silicon dioxide layers. Process tubes, wafer boats and gas injectors must maintain purity and dimensional stability through repeated thermal cycles.
LPCVD & PECVD
Chemical vapour deposition of polysilicon, silicon nitride and oxide films. Quartz components provide a clean, high-temperature environment with excellent process gas compatibility.
Annealing & RTP
Thermal annealing and rapid thermal processing steps that require precise temperature control and low contamination. Quartz boats and support structures ensure uniform heating.
Wet Cleaning & Etching
Acid and solvent-based cleaning steps. High-purity quartz tanks, carriers and vessels resist chemical attack while minimizing metallic contamination of wafers.
FGQuartz supplies quartz components for all major front-end process modules, supporting both established furnace platforms and new equipment designs.
Material Advantages for Semiconductor Use
- High SiO₂ purity with tightly controlled metallic impurities
- Excellent resistance to thermal shock and repeated temperature cycling
- Low particle generation when properly manufactured and cleaned
- Chemical inertness to most process gases and wet chemicals
- Dimensional stability under continuous high-temperature operation
- Optical transparency for pyrometry and visual process monitoring
- Available in clear and opaque grades according to process needs
- Fully customizable geometries via CNC machining and flame forming
Manufacturing Capabilities for Semiconductor Quartz
Precision Tube Production
High-quality process tubes drawn with controlled diameter, wall thickness and concentricity for horizontal and vertical furnace systems.
CNC Diamond Machining
Wafer boats, injectors, pedestals and complex fixtures machined to tight tolerances with fire-polished contact surfaces for low particle generation.
Oxy-Hydrogen Flame Forming
Flanged tubes, multi-port injectors, closed assemblies and specialized geometries fabricated by skilled flame working and annealed for stress relief.
Custom Semiconductor Quartz Solutions
When standard catalogue parts cannot meet the requirements of a new furnace platform or process, FGQuartz provides full custom fabrication. Customers can supply drawings (DXF, STEP, IGES, PDF) or physical samples for reverse engineering. Our engineering team reviews manufacturability, recommends the optimal grade and process route, and supports both prototype and production quantities with no minimum order restriction.
Frequently Asked Questions
Common questions from process engineers, equipment manufacturers and procurement teams about semiconductor quartz glass components.
Clear fused silica transmits visible, UV, and infrared light. It is used for process tubes where in-situ pyrometry reads through the tube wall, for RTP windows, and for UV lamp envelopes. Opaque quartz contains microscopic closed voids that scatter and absorb light, giving it much lower thermal emissivity. It behaves as a thermal insulator and is used for furnace liners, baffles, and spacers where heat shielding is required. Choosing the wrong grade leads to unexpected temperature non-uniformity: a clear tube where an opaque liner is needed allows heat to escape to the furnace body; an opaque tube where optical access is needed blocks the pyrometer signal entirely.
Yes. FGQuartz accepts drawings in DXF, STEP, or IGES formats. For customers who do not have drawings — for example, when replicating a worn-out legacy component whose original drawings are unavailable — the sample part is measured on a coordinate measuring machine and a new production drawing is created in-house. Prototype quantities down to a single piece are accommodated. Once the prototype is approved, production quantities follow the same machining programme with no additional qualification lead time.
FGQuartz manufactures the complete range of front-end quartzware: process tubes and diffusion tubes in both horizontal and vertical configurations; wafer boats and carriers for 100 mm through 300 mm wafer generations; gas injectors and injector rings for LPCVD and CVD furnaces; flanges, endcaps, and push rods; furnace liners in clear and opaque grades; quartz tanks and wet-bench vessels; thermocouple protection tubes; and fully custom CNC-machined parts produced to customer drawings or reverse-engineered from sample components.
Quartz glass combines properties that no other common material matches simultaneously: extreme thermal stability, near-zero thermal expansion to survive repeated furnace cycles without cracking, near-total chemical inertness against the acids and process gases used in wafer processing, and inherent high purity that prevents metallic contamination of the silicon lattice. Alumina and silicon carbide match some of these individually but not all together at the cost point that fused silica delivers. Borosilicate glass covers a fraction of the temperature range. Quartz glass is the only practical choice for front-end furnace environments above approximately 800 °C.