Wafer Boats · Diffusion Boats · Wafer Carriers · 2″–12″
Quartz Boat Manufacturer & Supplier
A quartz boat is a slotted high-purity fused silica carrier that holds silicon wafers during diffusion, oxidation and other furnace processes. Also called a wafer boat or diffusion boat, it keeps wafers evenly spaced and contamination-free at high temperature. FGQuartz has manufactured quartz boat products since 2005 from Lianyungang, China, supplying standard and fully custom wafer boats for 2″–12″ wafers to buyers worldwide.
- High Purity
- Fused Silica
- Grade matched to your process
- 2″–12″
- Wafer Sizes
- 100–300 mm
- Custom Slots
- Pitch & Count
- Built to your tool
- Est. 2005
- 20 Years’ Experience
- Ships internationally
What Is a Quartz Boat?
A quartz boat is a slotted carrier made from high-purity fused silica that holds a batch of silicon wafers upright and evenly spaced inside a furnace tube. The slots fix the pitch between wafers so gas and heat reach every surface uniformly during diffusion, oxidation or deposition.
Why a fused silica boat instead of metal or ceramic? Metal carriers oxidise and shed particles, and many ceramics are porous or contaminating. A quartz wafer boat gives the purity, thermal stability and clean contact that wafer processing demands — holding wafers steady at high temperature without adding metallic contamination.
Key Properties of a Quartz Wafer Boat
High Purity
High-purity fused silica with low metallic impurities protects wafers from contamination — the exact grade is matched to your process and cleanliness requirement.
Precise Slot Spacing
Accurate slot pitch keeps wafers evenly spaced for uniform diffusion, oxidation and deposition.
High-Temperature Stability
Holds shape and wafer position through furnace cycles, with a softening point near 1680 °C.
Thermal-Shock Resistance
A very low expansion coefficient lets the boat ride in and out of hot zones without cracking.
Uniform Heat Handling
Even thermal behaviour across the boat supports consistent results from wafer to wafer.
Chemical Inertness
Resistant to process gases and most acids (excluding hydrofluoric acid) used in wafer fabs.
Types of Quartz Boat We Supply
From multi-slot wafer boats to combustion boats and custom slot layouts, the range below covers the most requested quartz boat formats. Tell us the wafer size, slot count and tool and we will match the right boat for you.
Multi-Slot Wafer Boat
Wafer boat quartz carrier with multiple slots for batch processing of 2″–12″ wafers.
Multi-slot · batch loading
Semiconductor Diffusion Boat
Semiconductor quartz boat / quartz diffusion boat for diffusion, oxidation and LPCVD furnaces.
Diffusion · oxidation · LPCVD
Ship / Square Boat
Ship-style and square-profile boats to suit different tube geometries and loading systems.
Ship style / square profile
Quartz Wafer Carrier
Quartz wafer carrier for transport, storage and handling between process steps.
Carry · store · handle
Combustion / Evaporation Boat
Small boats for combustion analysis, evaporation and material handling in labs and industry.
Combustion · evaporation
Cleaning / Process Tray
Slotted trays for wet cleaning, rinsing and process handling of wafers.
Wet clean · rinse · handling
Large-Capacity Boat
High-slot-count boats for larger batch runs and higher furnace throughput.
High slot count · throughput
Custom Slot Pitch / Count
Boats built to your wafer size, slot pitch, slot count and tube fit, to your drawing.
Built to spec · custom fabrication
How to Choose the Right Quartz Boat
What wafer size and slot count?
Start from your wafer diameter (2″–12″ / 100–300 mm) and how many wafers you run per batch. These set the slot count and overall length so the boat fits your tube and throughput.
What slot pitch?
Slot pitch controls the gap between wafers, which affects gas flow and uniformity. Tell us your process and tool and we set the pitch to match — tighter for capacity, wider for uniformity.
Which style and grade?
Ship, square or tray style depends on your loading system; the grade depends on process cleanliness. We carry several grades, so the exact one is confirmed with our team against your application — not chosen from a code on this page.
Not sure which to pick? Send us your wafer size, slot count, pitch and furnace tube and we will recommend the right boat.
Applications of Quartz Boat Products
Semiconductor Manufacturing
Diffusion, oxidation, LPCVD and annealing of silicon wafers in tube furnaces.
Solar Photovoltaic
Wafer boats for solar cell diffusion and thermal processing of PV wafers.
High-Temperature Processing
Carriers for batch heat treatment and thermal processing in furnaces.
Laboratory & Analysis
Combustion and evaporation boats for analytical chemistry and materials testing.
Wet Cleaning & Handling
Slotted trays for cleaning, rinsing and transferring wafers between steps.
Process trays & carriers
Research & Pilot Lines
Custom boats for R&D, pilot production and specialty wafer formats.
Custom research boats
Custom Quartz Boat Fabrication
Send a drawing or your tool and wafer details and we will build the boat to match. We accept DXF, STEP and IGES files and produce single-piece prototypes through to production runs.
2″–12″ / 100–300 mm
set to your process and tube
style to suit your loader
rails, ends and supports
smooth, wafer-safe slots
sized to your furnace tube
Specifications & Options
| Form | Multi-slot boat; ship, square or tray style |
| Wafer size | 2″–12″ (100–300 mm) |
| Slot count & pitch | Set to your batch size and process |
| Appearance | Clear or opaque |
| Tube fit | Sized to your furnace tube diameter |
| Slot finish | Smoothed, wafer-safe edges |
| Grade | Matched to your process & application, confirmed before production |
Dimensions and finish are made to order. We carry several material grades; the exact grade is recommended by our team based on your use case rather than ordered from a code, to avoid mismatches.
Quality Control & Why FGQuartz
Every quartz boat goes through a strict in-house quality process, with inspection at each stage:
- Raw-material purity verification
- Slot pitch, count and overall dimension check on every custom order
- Surface, edge and slot quality inspection
- Thermal performance testing where specified
Backed by experience since 2005, in-house forming and welding for bespoke orders, a stable high-purity material supply and international shipping, FGQuartz serves semiconductor, solar, laboratory and industrial customers — from standard catalogue boats to one-off custom builds.
Quartz Boat FAQ
What is a quartz boat made of?
It is made from high-purity fused silica, so it holds wafers at high temperature without adding metallic contamination. The exact purity grade is matched to your process requirement.
What is a quartz boat used for?
It holds a batch of silicon wafers upright and evenly spaced during diffusion, oxidation, LPCVD and annealing in tube furnaces.
What is the difference between a wafer boat and a diffusion boat?
They are the same kind of part — a slotted quartz carrier. “Diffusion boat” simply names the process it is most often used for; both hold wafers by their slots.
What wafer sizes do your boats support?
We make boats for 2″ to 12″ wafers (about 100–300 mm), with slot count and pitch set to your batch.
Can you set a custom slot pitch and count?
Yes. We build the slot pitch, slot count and overall length to match your process, throughput and furnace tube.
What is a quartz wafer carrier?
A quartz wafer carrier is a slotted quartz part used to transport, store and handle wafers between process steps, keeping them separated and clean.
Do you make combustion or evaporation boats?
Yes. We supply small combustion and evaporation boats for analytical and materials work in addition to wafer boats.
Do you offer custom quartz boat fabrication?
Yes. We build boats to your wafer size, slot pitch, slot count, style and tube fit from DXF, STEP or IGES drawings, including single-piece prototypes.
Which grade should I choose?
We carry several grades, so we recommend the grade based on your process and application and confirm it before production rather than asking you to pick a code — this avoids costly misunderstandings.
Do you ship internationally?
Yes. FGQuartz ships quartz boat orders internationally and handles export documentation.
Related Quartz Products
Browse the full quartz glass product range or see every quartz glass application.
Whether you need a multi-slot wafer boat, a semiconductor diffusion boat, a quartz wafer carrier or a fully custom slot layout, FGQuartz is ready to quote. Tell us your wafer size, slot count and furnace tube and we will match the right boat for you.