High-Purity Semiconductor Quartz Glass Solutions
Engineered quartz components for the most demanding semiconductor manufacturing processes.
The Critical Role of Semiconductor Quartz Glass
In semiconductor manufacturing, process integrity relies on the absolute purity and stability of semiconductor Quartz Glass. This critical material is one of the few capable of withstanding extreme temperatures, rapid thermal cycling, and aggressive chemicals while maintaining an inert, contamination-free environment.
The performance of our high-purity semiconductor Quartz Glass components ensures process reliability, minimizes defects, and maximizes wafer yield, making us a vital partner to the industry.
Applications of Our Semiconductor Quartz Glass
Our components are engineered for flawless performance in the most critical stages of wafer fabrication.
Diffusion and Oxidation Furnaces
Our Quartz Glass Tubes form the ultra-pure process chamber, while our Quartz Glass Boats and cantilever paddles provide stable, contamination-free wafer handling at temperatures exceeding 1000°C.
Wet Etching and Cleaning
Chemically inert Quartz Glass Tanks are essential for wet bench stations, holding aggressive acids and solvents without leaching impurities. Their thermal stability allows for heated chemical baths.
CVD, PECVD, and Epitaxy
We fabricate complex, Custom Quartz Glass components like reaction chambers, gas injectors, and bell jars. The material’s purity is critical for achieving defect-free thin film deposition.
Plasma Etch and Ashing
Durable Quartz Glass Plates and rings are used in plasma etch chambers due to their resistance to plasma erosion and their ability to maintain electrical insulation, ensuring process stability.
Product Portfolio for the Semiconductor Industry
Process tubes for diffusion and CVD furnaces, engineered for exceptional thermal stability and purity.
Precision-slotted wafer carriers with tight tolerances to ensure wafer security and uniform processing.
Robust, seamless tanks for wet etching and cleaning, offering superior resistance to chemical corrosion.
Complex, custom-fabricated parts like injectors, rings, and chambers per your exact specifications.