High-Purity Quartz Glass Plates
We engineer our High-Purity Quartz Glass Plates for superior performance in mission-critical systems. Specifically, these plates deliver a unique combination of exceptional thermal stability and broadband optical transmission. We manufacture them from select-grade Quartz Glass, thus making them a foundational component for demanding semiconductor and optical applications. Whether you require ultra-flat substrates or durable viewports, our plates consequently provide a reliable, custom-fabricated solution.
Our Quartz Glass Plates are distinguished by their exceptional material properties. For example, key advantages include ultra-high purity (≥ 99.99% SiO₂) to prevent process contamination and outstanding resistance to thermal shock. In addition, we offer comprehensive custom fabrication services, including advanced CNC machining, to meet your exact specifications.
Material Science and Manufacturing Excellence
The superior performance of our Quartz Glass Plates begins with the material itself. Indeed, we utilize only the highest-grade Quartz Glass, which features an amorphous, non-crystalline structure. As a result, this structure yields isotropic properties, meaning its physical characteristics are uniform in all directions. Furthermore, our advanced manufacturing processes translate this material advantage into a final product with outstanding dimensional accuracy and minimal stress. From protective windows in plasma environments to ultra-flat substrates for thin-film deposition, we therefore engineer each plate to provide a contamination-free and stable solution for your most critical processes.
Quartz Glass Plate Specifications
Material Purity (SiO₂): ≥ 99.99% (High-Purity Quartz Glass)
Available Grades: Quartz Glass, Synthetic Fused Silica (JGS1, JGS2, JGS3)
Standard Dimensions: Square, rectangular, and circular plates up to max 1200mm
Thickness: Standard 1mm to 50mm; custom thicknesses available
Thickness Tolerance: High-precision tolerance available upon request
Custom Shapes: Any custom shape via CNC machining from your CAD drawings
Surface Finish: Optical polishing (single or double side), precision grinding, as-cut
Surface Flatness: High-precision flatness for optical applications
Edge Finish: Diamond cutting, beveling/chamfering, flame polishing, grinding
Key Applications for Quartz Glass Plates
Within the ultra-clean environment of semiconductor fabrication, our Quartz Glass Plates are indispensable. For instance, they function as chamber windows, liners, and covers in etch tools. In this context, their high purity prevents metallic contamination while their thermal stability ensures process consistency.
The excellent broadband optical transmission of our plates makes them a first choice for high-performance optics. In fact, we fabricate them into laser windows, optical flats, and substrates for coatings. In these applications, of course, optical clarity and durability are paramount.
Our Quartz Glass Plates excel as viewports in high-temperature industrial furnaces. Specifically, their low thermal expansion provides outstanding resistance to thermal shock. This, in turn, allows for clear process observation at temperatures up to 1200°C without risk of cracking.