High-Purity Quartz Glass Tanks
We engineer our High-Purity Quartz Glass Tanks to provide the ultimate in chemical resistance and process purity for wet chemical applications. Also known as quartz baths or vessels, these tanks are essential for semiconductor wet etching, wafer cleaning, and high-purity chemical processing where contamination control and material integrity are mission-critical.
Our Quartz Glass Tanks are distinguished by their monolithic construction and material purity. For example, key advantages include ultra-high purity (≥ 99.99%) to prevent leaching and contamination, and exceptional resistance to aggressive acids and thermal shock. In addition, we offer comprehensive custom fabrication to meet your exact dimensional and feature requirements.
Material Purity and Fabrication Excellence
The superior performance of our Quartz Glass Tanks begins with the selection of premium-grade Quartz Glass. Indeed, this material is virtually immune to most acids, solvents, and chemicals, ensuring zero process contamination from leaching. As a result, this material purity is critical for achieving target etch rates and high yields in semiconductor wet processing. Furthermore, our proprietary fabrication techniques allow us to create seamless, monolithic tanks with smooth, fire-polished internal surfaces. This construction minimizes particle trapping and allows for easy, complete cleaning between process cycles.
Quartz Glass Tank Specifications
Material Purity (SiO₂): ≥ 99.99% (Ultra-High Purity)
Chemical Resistance: Excellent against most acids, alkalis, and solvents
Max. Operating Temperature: 1100°C (Continuous)
Thermal Shock Resistance: Excellent
Standard Configurations: Rectangular and cylindrical; various standard volumes available
Custom Features: Flanges, drains, overflows, and custom porting available
Semiconductor Wet Etch: Suitable for strong acid environments such as HF and HCl, ensuring process stability and long life.
Wafer Cleaning: The smooth surface reduces particle adhesion, making it ideal for RCA cleaning and ultrapure water rinsing.
High-Purity Chemical Processing: Providing an inert environment to prevent chemical contamination and ensure batch consistency.
Key Applications for Quartz Glass Tanks
Our Quartz Glass Tanks are the industry standard for wet etching and cleaning baths in semiconductor wet benches. In this context, their resistance to aggressive acids like HF and HCl ensures process stability and a long service life.
For chemical synthesis and purification where purity is paramount, our quartz vessels provide an inert environment. This, in turn, prevents contamination of high-value chemicals and ensures consistent batch-to-batch quality.
Our Quartz Glass Tanks, including those with overflow weirs, are ideal for RCA cleaning and DI water rinsing stations. Consequently, their smooth, non-porous surface helps to minimize particle adhesion and ensures ultra-clean wafer surfaces.