High-Purity Quartz Glass Boats
We engineer our High-Purity Quartz Glass Boats for maximum wafer yield and process integrity in mission-critical semiconductor furnaces. Also known as wafer carriers, these boats deliver exceptional dimensional stability and purity through thousands of high-temperature thermal cycles. We manufacture them from select-grade Quartz Glass, thus making them the industry standard for LPCVD, diffusion, and oxidation applications where performance cannot be compromised.
Our Quartz Glass Boats are distinguished by their superior design and fabrication quality. For example, key advantages include ultra-high purity (≥ 99.99%) to prevent wafer contamination and outstanding resistance to sag and deformation. In addition, we offer comprehensive custom fabrication, including advanced CNC machining of slots, to meet your exact wafer handling and furnace specifications.
Design Integrity and Fabrication Excellence
The superior reliability of our Quartz Glass Boats begins with material science. Indeed, we utilize only high-purity Quartz Glass for its extremely low Coefficient of Thermal Expansion (CTE), which prevents mechanical stress on wafers during rapid thermal cycling. As a result, this structural integrity ensures our wafer carriers resist warping and sag over a long service life. Furthermore, every slot is precision-machined and flame-polished to create an ultra-smooth, devitrification-resistant surface. This minimizes particle generation and supports seamless integration with automated wafer handling systems.
Quartz Glass Boat Specifications
Applicable wafer sizes: 2″ to 12″ (50mm – 300mm)
Structure types: Horizontal boat, vertical boat, and other custom configurations
Slot design: Single, dual, or multi-slot (standard 25/50 slots, customizable)
Slot shape: V-groove, square groove, or customizable according to drawings
Ultra-high purity: SiO₂ ≥ 99.99%, effectively preventing process contamination.
Excellent thermal stability: Continuous operating temperature up to 1100°C.
Extreme thermal shock resistance: Extremely low thermal expansion coefficient, capable of withstanding drastic temperature fluctuations.
Excellent mechanical strength: Resists bending and deformation at high temperatures.
Key Applications for Quartz Glass Boats
Our Quartz Glass Boats are essential for maintaining precise wafer spacing within horizontal and vertical furnaces. In this context, their purity is critical for preventing contamination during sensitive thin-film deposition and doping processes.
The exceptional thermal stability of our wafer carriers prevents warping during high-temperature oxidation and annealing. This, in turn, minimizes wafer stress and prevents costly breakage, ensuring consistent process results.
We machine our Quartz Glass Boats to exacting dimensional tolerances. Consequently, this ensures seamless compatibility with robotic arms and other automated wafer handling systems, which is crucial for modern, high-volume fabs.