A wafer boat (also known as a quartz boat) is a high-purity quartz carrier used to hold semiconductor wafers during high-temperature processing. These precision-engineered fixtures can withstand extreme temperatures (up to 1200°C) and resist most chemicals, ensuring wafers remain uncontaminated. In semiconductor manufacturing, wafer boats are essential for processes like oxidation, diffusion, and chemical vapor deposition (CVD), providing uniform heating and contamination-free handling of wafers. Fgquartz, a specialized quartz glass manufacturer, offers custom wafer boat solutions designed for these demanding applications.

Applications of Quartz Wafer Boats in Semiconductor & Solar

Wafer boats are indispensable in any setting that requires high-temperature wafer processing. Key applications include:

  • Semiconductor & Electronics: Used in diffusion furnaces for silicon wafer oxidation, annealing, and CVD. Wafer boats provide a controlled, contamination-free environment essential to microchip and LED fabrication.

  • Photovoltaic (Solar) Industry: Holding solar cell substrates during high-temperature annealing and thin-film deposition for PV cell and solar panel production.

  • Laboratory & Research: Facilitating high-temperature experiments and material tests. Quartz boats are ideal for chemical reactions, thermal analysis, and sample preparation in research environments.

  • Industrial Processing: Containing materials during melting, sintering, or refinement in glass, ceramic, and metal industries. These boats withstand corrosive conditions and extreme heat in advanced manufacturing processes.

Wafer Boat Features: Why Choose Fgquartz Quartz Boats

Fgquartz wafer boats combine purity, durability, and precision to meet semiconductor requirements:

  • High-Purity Quartz (4N): Constructed from 99.99% pure fused silica, minimizing contamination in sensitive processes.

  • Extreme Temperature Capability: Rated for continuous use up to 1200°C (with brief tolerance of ~1450°C), matching the demands of diffusion and oxidation cycles.

  • Chemical & Thermal Stability: Excellent resistance to acids and most chemicals at high temperatures, with very low thermal expansion to reduce stress during rapid heating/cooling.

  • Custom Size & Design: Available for standard wafer diameters (e.g., 2″, 4″, 6″, 8″, 12″) and custom dimensions. Boats can be open or slotted to securely hold multiple wafers in parallel.

  • Precision Manufacturing: Each boat is fabricated to exact specifications, ensuring uniform wafer spacing and even temperature distribution.

  • Reusability: Quartz boats are durable and can be cleaned (e.g., with deionized water or alcohol) for long-term reuse.

  • Competitive & Global Supply: Fgquartz offers factory-direct pricing on bulk orders, along with fast worldwide shipping, making it easy to procure large quantities of customized boats.

Wafer Boat Technical Specifications and Material Details

Fgquartz provides detailed specifications to support your process design:

  • Material: 99.99% high-purity fused silica (quartz).

  • Temperature Rating: Up to 1200°C continuous (peak up to ~1450°C).

  • Wafer Sizes & Capacity: Supports one wafer diameter per boat (from 1″ to 12″, or 25–300 mm). Each boat can hold up to ~25 wafers (each ~0.5 mm thick) when fully loaded.

  • Boat Types: Slotted quartz boats securely hold multiple wafers in parallel slots; open boats allow single-wafer loading.

  • Thermal Expansion: Very low coefficient (on the order of 0.55×10<sup>-6</sup>/°C), minimizing dimensional changes during temperature swings.

  • Dimensions: Boats are available in lengths up to several hundred millimeters; custom lengths and slot counts are also supported.

  • Orientation: Suitable for both horizontal and vertical furnace configurations, offering flexibility for different equipment setups.

Why Choose Fgquartz Wafer Boats

Fgquartz specializes in high-purity quartz glass solutions, and its wafer boats offer significant advantages:

  • Proven Expertise: Over 20 years of quartz glass manufacturing experience ensures quality and reliability.

  • Quality Assurance: Every boat meets strict purity and dimensional standards, resulting in high performance and minimal defects.

  • Customization: Fgquartz can produce bespoke boat designs (square or round, with special slot patterns or integrated handles) to match unique process needs.

  • Dedicated Support: Technical assistance helps you select the right boat and optimize your process.

  • Competitive & Global: Factory-direct production, bulk pricing, and worldwide shipping make Fgquartz wafer boats a cost-effective choice for international customers.

Fgquartz’s team is ready to assist with your wafer boat inquiries and provide a custom solution for your application.

Contact Fgquartz today to learn more about our wafer boat products and how they can improve your semiconductor or solar manufacturing processes.

📧 Email: fgquartz@outlook.com
🌐 Website: www.fgquartz.com