🌟 Wafer Boat Solutions for Semiconductor Processing

Wafer boats (also called quartz wafer boats) are essential components in high-temperature semiconductor wafer processing. These high-purity fused silica carriers are engineered to hold silicon wafers securely during oxidation, diffusion, and CVD processes. Our quartz wafer boats for semiconductor applications support ultra-clean handling, precise wafer alignment, and consistent thermal performance.

Made from 99.99% fused silica, each wafer boat offers excellent chemical resistance, dimensional stability, and compatibility with cleanroom environments. Whether used in chip fabrication, photovoltaic panel production, or laboratory settings, FGQuartz’s custom wafer boats are designed to withstand harsh thermal and chemical conditions.

πŸš€ Improve yield, enhance thermal uniformity, and eliminate contamination with every quartz wafer boat you deploy.

πŸ”§ Quartz Boats for Semiconductor Processing Applications

πŸ”Ή Quartz Boats for Diffusion and Oxidation Furnaces

In semiconductor manufacturing, quartz wafer boats are used to hold wafers during high-temperature diffusion and oxidation cycles. These fused silica wafer carriers maintain even wafer spacing and allow for optimal gas flow inside vertical and horizontal furnaces.

πŸ”Ή High Temperature Wafer Boats for Solar Panel Production

In the photovoltaic industry, high-temperature wafer boats hold solar substrates during dopant diffusion, thermal annealing, and thin-film coating. The thermally stable quartz wafer holders offer repeatable reliability for solar cell production lines.

πŸ”Ή Wafer Boats in R&D and Experimental Labs

Quartz boats for cleanroom use are popular in research labs for plasma treatment, material testing, and high-temperature synthesis. These semiconductor wafer carriers support precision experiments with aggressive acids and elevated heat conditions.

πŸ”Ή Industrial-Grade Quartz Boats

Used in ceramics, optical glass, and metallurgy, these custom quartz wafer boats function as durable carriers for advanced heat treatments and chemically intense processes.

βœ… Key Features of FGQuartz Wafer Boats

FGQuartz offers custom quartz wafer boats for wafer handling that are engineered for demanding environments:

  • πŸ”¬ Ultra-Pure Fused Silica: Made from β‰₯99.99% high-purity quartz glass.
  • πŸ”₯ Thermal Endurance: Suitable for continuous use at 1200Β°C and peak temperatures near 1450Β°C.
  • πŸ§ͺ Corrosion Resistance: Compatible with HF, SC1/SC2, NHβ‚„OH, and other aggressive etchants.
  • πŸ“ Tailored Designs: Options include open or slotted quartz boats for wafers sized from 2″ to 12″.
  • ✨ Polished Finish: Flame-polished interiors reduce particle shedding and ease cleaning.
  • ♻️ Reusability: Excellent dimensional stability ensures long lifecycle performance.

πŸ“Š Wafer Boat Technical Specifications

πŸ” PropertyπŸ“ Specification
Material99.99% High-Purity Quartz Glass
Operating TemperatureUp to 1200Β°C continuous, 1450Β°C peak
Wafer Size Compatibility25–300 mm (1″–12″)
Boat ConfigurationsSlotted (multi-wafer) or Open (single-wafer)
Thermal Expansion Coeff.~0.55 Γ— 10⁻⁢ / Β°C
Chemical CompatibilityHF, HCl, SC1, SC2, HNO₃, NHβ‚„OH
OrientationHorizontal and Vertical Furnace Compatible
Surface FinishSmooth, Flame-Polished Interior

🌍 Why FGQuartz for Custom Quartz Wafer Boats?

FGQuartz has been manufacturing wafer boats for semiconductor applications and solar processing for over 20 years. Our tailored quartz boats for wafer handling meet the needs of OEMs, fabs, and R&D labs globally:

  • πŸ— Custom Engineering: All boats are built to match specific wafer sizes, slot spacing, and thermal profiles.
  • πŸ§ͺ Stringent Quality Checks: Each quartz wafer boat is tested for purity, stress, and dimensional accuracy.
  • ✈️ Worldwide Logistics: Export-ready with safe packaging, fast delivery, and support across continents.
  • πŸ”© Broad Product Range: Match wafer boats with our quartz tanks, tubes, viewports, and bell jars.
  • πŸ‘¨β€πŸ’» Design Assistance: Receive guidance on material choice, furnace compatibility, and quartz part integration.

πŸ’Ό Choose FGQuartz as your global partner for fused silica wafer carriers and high-performance wafer boats.

πŸ“© Request a Wafer Boat Quote

Need high temperature wafer boats or a semiconductor wafer carrier custom-fit to your process?

FGQuartz offers:

βœ”οΈ Free engineering consultation
βœ”οΈ Sample-ready prototypes and quick quoting
βœ”οΈ Volume production and global fulfillment

πŸ“§ Email: fgquartz@outlook.com
🌐 Website: www.fgquartz.com
πŸ“¦ High-Purity Quartz Boats – Trusted by fabs and labs worldwide