Quartz Glass for Semiconductor

High Purity · Thermal Resistance · Chemical Stability

Quartz tanks for wet etching are critical in semiconductor manufacturing, especially in acid-based cleaning and etching processes. As part of our broader quartz glass for semiconductor product line, FG Quartz supplies high-purity, corrosion-resistant quartz components for wafer-level chemical processing.

✅ High Purity Quartz Glass for Clean Wafer Processing

In semiconductor fabrication, purity is everything. Our high purity quartz glass—with SiO₂ content ≥99.99%—ensures a particle-free, metal-free processing environment. Semiconductor-grade quartz helps maintain cleanroom standards, preventing contamination that can lead to device failure.

Key Benefits:

• Prevents metal ion and particle contamination
• Compatible with cleanroom-grade equipment
• Supports high wafer yield and stable device quality

Common quartz components for semiconductor use include:
Quartz tubes, boats, crucibles, carriers, and sleeves—essential for wafer diffusion and oxidation processes.

🔥 Thermal Endurance for High-Temperature Processes

Quartz glass for semiconductor manufacturing must tolerate extreme thermal conditions. Our fused silica parts withstand continuous temperatures above 1100°C, making them ideal for:

• Diffusion and oxidation furnaces
• CVD (Chemical Vapor Deposition) reactors
• Rapid thermal processing (RTP)
• Annealing and dopant activation

Why it matters:

• High softening point (~1700°C) prevents deformation
• Excellent resistance to thermal shock
• Long service life in repeated heating cycles

This thermal performance ensures that quartz components for high-temperature semiconductor processes remain stable and dimensionally accurate over time.

🧪 Chemical Resistance in Wet Etching and Cleaning

During wet etching, cleaning, or SC1/SC2 chemical treatments, materials must resist strong acids and solvents. Our semiconductor-grade quartz glass exhibits superior chemical stability against most corrosive agents (excluding HF), making it ideal for:

• Wet etching tanks
• Acid cleaning baths
• Stripping stations and RCA clean lines

Advantages:

• Excellent long-term durability
• Minimal surface degradation or leaching
• Maintains purity of chemical solutions

🔍 Optical Clarity for Monitoring and Lithography

Quartz glass for semiconductor optics offers outstanding UV and IR light transmission, enabling critical visual and laser-based monitoring applications. Its optical clarity is essential in:

• Photolithography exposure systems
• Laser etching or ablation tools
• Observation windows and viewports

Results:

• High transparency from UV to IR
• Precision monitoring during real-time processing
• Contamination-free optical interfaces

🧯 Dimensional Stability from Low Thermal Expansion

Our fused silica quartz components offer an extremely low thermal expansion coefficient (~0.5×10⁻⁶/K). This property minimizes mechanical stress during fast heating and cooling cycles, preventing:

• Microcracks or structural warping
• Shifts in component positioning
• Decreased alignment accuracy in precision tools

This stability makes quartz ideal for high-precision semiconductor machinery.

🛠 Applications of Quartz Glass in Semiconductor Manufacturing

💡 Why Choose FG Quartz?

At FG Quartz, we focus exclusively on the semiconductor industry. Our quartz glass products are made with precision, speed, and quality:

• ✔ Custom fabrication of complex quartz components for semiconductors
• ✔ ISO-certified manufacturing and QC
• ✔ Quick prototyping and scalable production
• ✔ Decades of export experience and global partnerships

We support OEMs and fabs across the world with dependable, high-performance quartz solutions.

📩 Contact Us

Have a custom requirement? Need a fast quote?

📧 Email: fgquartz@outlook.com
🌐 Website: fgquartz.com
📦 Serving semiconductor clients worldwide