What Are Quartz Boats?
Quartz boats are specialized carriers used to hold silicon wafers during high-temperature processes such as diffusion, oxidation, and CVD in semiconductor manufacturing.
They are typically used in furnace systems and are designed with precision slots to securely hold wafers in vertical or horizontal positions.
Key Advantages
Ultra High Purity
SiO₂ ≥ 99.99%, low metal impurities for semiconductor-grade environments.
High Temperature Resistance
Stable performance in high temperature furnace environments up to 1100°C.
Precision Slot Alignment
Accurate wafer positioning with tight tolerance slot spacing.
Thermal Stability
Excellent resistance to thermal shock and deformation.
Low Contamination
Minimal particle generation suitable for cleanroom environments.
Custom Design Available
Fully customizable for different wafer sizes and furnace systems.
Technical Specifications
| Parameter | Value |
|---|---|
| Material | High Purity Fused Quartz |
| SiO₂ Purity | ≥ 99.99% |
| Wafer Size | 2″, 3″, 4″, 6″, 8″, 12″ |
| Slot Spacing Tolerance | ±0.2 mm |
| Length | Custom |
| Working Temperature | Up to 1100°C |
| Surface Roughness | Ra < 0.4 μm |
| OH Content | < 10 ppm |
| Metal Impurities | < 20 ppm |
Quartz Boat Types
12-inch Quartz Boats
8-inch Quartz Boats
Custom Quartz Boats
Applications in Semiconductor Industry
Diffusion Processes
Used in high temperature diffusion furnaces for wafer doping.
Annealing
Used in thermal annealing systems for semiconductor wafers.
Oxidation
Supports wafer oxidation processes in controlled environments.
Wafer Handling
Secure transport and positioning of wafers during processing.
CVD Processing
Carrier structure for chemical vapor deposition processes.
Cleanroom Manufacturing
Compatible with ultra-clean semiconductor environments.
Custom Quartz Boat Manufacturing
We provide fully customized quartz boats based on customer drawings and furnace requirements, including precise slot design and dimensional control.
Slot design optimization
Wafer size adaptation
Precision machining
Surface polishing
Structural reinforcement
Engineering support
Quality Control
- Raw material purity inspection
- Dimensional measurement
- Slot alignment inspection
- Surface quality and cleanliness control
Why Choose FGQuartz
- Specialized in semiconductor quartz components
- Precision machining capability
- Stable high purity material supply
- Strict quality control system
- Custom engineering support