1. What Is a Quartz Boat?
A quartz boat is a carrier made of high-purity quartz glass, used to hold semiconductor wafers, solar wafers, or glass substrates during high-temperature processes. The quartz glass boat provides excellent thermal stability and chemical resistance, essential for contamination-free wafer handling in oxidation, diffusion, and CVD processes.
2. Key Features of Quartz Glass Boats
High Temperature Resistance — Our quartz boats withstand continuous use at 1200°C and short-term exposure up to 1450°C.
High Purity (99.99%) — Critical for semiconductor-grade and optical applications.
Chemical Stability — Resistant to acids and most chemicals, ensuring durability in harsh environments.
Low Thermal Expansion — Minimizes cracking risk during rapid temperature changes.
Precision Manufacturing — Custom sizes and shapes tailored to fit various wafer boat dimensions.
3. Applications of Quartz Glass Boats and Quartz Boats
3.1 Semiconductor Applications for Quartz Boats
Quartz glass boats are indispensable in the semiconductor industry. They are used in:
Diffusion furnaces for silicon wafer processing
Oxidation and annealing cycles
Chemical vapor deposition (CVD)
Microchip and LED production
3.2 Photovoltaic Industry Uses of Quartz Glass Boats
In solar panel manufacturing, quartz boats hold solar wafers securely during:
Thin-film deposition
Heat treatment and annealing
3.3 Laboratory and Research Uses of Quartz Glass Boats
High-purity quartz boats support:
Chemical experiments at high temperatures
Thermal analysis
Sample preparation in scientific labs
4. Types of Quartz Boats and Quartz Glass Boats
| Type | Features & Applications |
|---|---|
| Open Quartz Boat | Standard carrier, easy loading/unloading of wafers |
| Slotted Quartz Boat | Designed to hold multiple wafers securely |
| Custom Quartz Boat | Made to fit specific furnace sizes and wafer diameters |
5. How to Choose the Right Quartz Boat for Your Wafer Process
5.1 Temperature Resistance
Make sure your quartz boat supports your process temperatures. Our quartz glass boats are rated for continuous 1200°C use and short-term up to 1450°C.
5.2 Size and Design
Choose a quartz boat size that matches your wafer diameter, such as 2″, 4″, 6″, or 8″. Slotted wafer boats are recommended for secure wafer placement in semiconductor processes.
5.3 Purity and Material Quality
Use 99.99% high-purity quartz glass boats to minimize contamination risks. Custom manufacturing is available for precise dimensional needs.
6. Why Choose FG Quartz Glass Boats?
✅ High-purity quartz glass boats with superior thermal resistance
✅ Custom fabrication for all wafer sizes and furnace types
✅ Precision manufacturing to ensure minimal defects and high performance
✅ Competitive pricing with direct factory supply and bulk order discounts
✅ Fast global shipping and excellent customer support
📩 Request a free quote today!
7. Frequently Asked Questions About Quartz Boats and Quartz Glass Boats
Q1: What is the difference between quartz boats and ceramic boats?
Quartz boats offer higher purity and temperature resistance (over 1200°C), while ceramic boats are less expensive but may cause contamination in semiconductor use.
Q2: Can quartz boats be reused?
Yes. Proper cleaning with deionized water, isopropyl alcohol, or plasma cleaning allows for multiple reuses.
Q3: Do you provide custom quartz boat designs?
Yes. FG Quartz offers custom sizes, slotted designs, and precise fabrication tailored to your needs.
Quartz boats and quartz glass boats made from high-purity quartz glass are essential in semiconductor, photovoltaic, and laboratory industries. Their excellent thermal resistance, chemical stability, and precise manufacturing ensure optimal wafer processing and high-temperature experiment performance.
📧 Contact us: fgquartz@outlook.com
🌐 Visit: www.fgquartz.com
