Why does the semiconductor industry only recognize quartz glass? | Quartz Glass in Semiconductor Manufacturing

In the semiconductor manufacturing process, there are extremely strict requirements for the cleanliness, corrosion resistance and high temperature resistance of the material. Among many materials, quartz glass has become the preferred material in the semiconductor industry, with almost no substitutes. This article will deeply analyze why quartz glass has an unshakable position in the semiconductor field.

1. High-purity materials that meet clean room requirements

  • The purity of quartz glass is as high as 99.99% or more of silicon dioxide (SiO₂), and does not contain any metal ions or impurities.
    In semiconductor chip manufacturing, a tiny impurity may cause the chip to fail, so:
  • Quartz glass does not release pollutants
  • Meets ultra-high cleanliness standards (Class 10 – Class 100)
  • Widely used in key components such as wafer cleaning tanks, reaction chambers, wafer boats, and wafer carriers

2. Resistant to extreme temperatures to ensure process stability

  • Quartz glass can be used for a long time at 1200℃, with a short-term temperature resistance of up to 1450℃, and a softening point of up to 1700℃.
  • The key thermal process links in semiconductors include:
  • High-temperature annealing
  • Diffusion
  • Chemical vapor deposition (CVD)
  • All of these need to be completed in a high-temperature atmosphere, and ordinary glass, ceramics or plastics are far from competent.

3. Strong corrosion resistance, suitable for strong acid cleaning

  • In the wafer cleaning process, strong acid mixtures such as hydrofluoric acid (HF), hydrochloric acid (HCl), and nitric acid (HNO₃) are often used, and ordinary glass will be quickly corroded.
    Quartz glass has excellent acid resistance:
  • Can withstand HF/HCl mixed acid cleaning for a long time
  • No metal ions are precipitated
  • Ensure that the wafer surface is not contaminated by secondary pollution
  • This is why quartz cleaning tanks are almost the standard configuration for wet cleaning of wafers.

4. Optical transparency & electrical insulation

  • Quartz glass has good transmittance to ultraviolet and visible light, and has strong electrical insulation.
  • This allows it to be used for:
  • UV photolithography window
  • Optical elements in optical alignment systems
  • Insulating structures in high-voltage ionization devices

5. Precision processing, suitable for high customization needs

  • Quartz glass can be:
  • cutting, drilling, welding, sealing
  • Made into customized quartz boats, quartz tubes, wafer boxes, cleaning tanks and other complex structures
    Meet the production line design and equipment requirements of different chip factories.

Quartz glass has become an indispensable core material in the semiconductor industry due to its comprehensive advantages such as high purity, high temperature resistance, corrosion resistance, strong insulation and strong machinability. Whether in cleaning, annealing, etching, or packaging, quartz is a standard configuration.

If you are a semiconductor equipment manufacturer or chip factory supply chain company, please contact us to customize high-quality quartz parts.