Quartz Glass for Semiconductor
High Purity · Thermal Resistance · Chemical Stability
Quartz glass is a vital material in the semiconductor industry, known for its ultra-high purity, excellent thermal performance, and strong chemical resistance. At FG Quartz, we manufacture precision quartz components tailored for the most demanding semiconductor processes.
✅ High Purity Quartz Glass for Clean Wafer Processing in Semiconductor Manufacturing
Quartz glass with ≥99.99% SiO₂ purity ensures a contamination-free environment in critical wafer fabrication steps.
Benefits:
- Prevents metal ion contamination
- Ideal for cleanroom-grade equipment
- Maintains high device yield
💡 Common parts: Quartz tubes, boats, carriers
🔥 Thermal Endurance for High-Temperature Processes
Quartz glass tolerates temperatures above 1100°C, making it ideal for:
- Diffusion and oxidation
- CVD (Chemical Vapor Deposition)
- Annealing and thermal treatments
Why it matters:
- High softening point (~1700°C)
- Resistant to thermal shock and deformation
- Reliable in repeated heating cycles
🧪 Chemical Resistance in Wet Etching and Cleaning
Quartz is chemically stable against most acids (except HF), enabling safe long-term use in:
- Wet etching tanks
- Acid cleaning baths (SC1/SC2)
- Resist stripping stations
Advantage: Extended service life with minimal corrosion or degradation.
🔍 Optical Clarity for UV and IR Semiconductor Systems
Quartz glass offers excellent light transmission from deep ultraviolet (UV) to infrared (IR), crucial for:
- Photolithography exposure systems
- Laser etching viewports
- Process observation windows
Result: Clear visibility and precision in optical monitoring.
🧯 Stability from Low Thermal Expansion
Quartz’s low thermal expansion (~0.5×10⁻⁶/K) reduces stress during rapid temperature changes.
Result:
- Fewer cracks or warping
- Greater dimensional stability
- Longer component lifespan
🛠 Quartz Glass Applications in Key Semiconductor Manufacturing Processes
| 📍 Process Area | 🔧 Quartz Glass Products |
|---|---|
| Wafer Diffusion / Oxidation | Quartz tubes, boats, crucibles |
| Wet Etching / Cleaning | Quartz tanks, lids, carriers |
| Plasma Dry Etching | Quartz rings, plates, chamber liners |
| Vacuum / CVD Processing | Quartz bell jars, observation windows |
| Optical Monitoring | Quartz viewports for photolithography tools |
💡 Why Choose FG Quartz for Custom Semiconductor Quartz Glass Solutions
- ✔ Custom production for complex quartz parts
- ✔ ISO-certified quality control
- ✔ Fast delivery for prototypes & volume orders
- ✔ Experienced global supplier
📩 Email us today: fgquartz@outlook.com
🌐 Website: fgquartz.com
